Photoresist Processing Trouble-Shooting Etchants and Solvents
Strange Appearance (Color, Particles) of the Resist (Film)… Bubbles in the Resist Film? Development Rate too low Dark Erosion too high Lift-off does not work (well) Inferior Resist Adhesion
Unsuited Substrate Pretreatment? Using Image Reversal Resists? Transparent/Highly reflective Substrates? During Wet chemical Etching... During Etching with HF