Photoresist Processing Trouble-Shooting Etchants and Solvents
Strange Appearance (Color, Particles) of the Resist (Film)… Bubbles in the Resist Film? Development Rate too low Dark Erosion too high Lift-off does not work (well) Inferior Resist Adhesion
Sufficient Softbake? Suited Developer (-concentration) With Image Revesal Resists... Filtration of expired/diluted Resist? Light Scattering/Diffraction below the Mask? Undesired Exposure of Resist Films?