Photoresist Processing Trouble-Shooting Etchants and Solvents
Strange Appearance (Color, Particles) of the Resist (Film)… Bubbles in the Resist Film? Development Rate too low Dark Erosion too high Lift-off does not work (well) Inferior Resist Adhesion
Resist Film Thickness increased? Developer expired? Exposure Dose too low? Suited Developer (-concentration)? Sufficient Rehydration? Filtration of diluted/expired Resists? Resist suited for the applied (high) Resist Film Thickness?