Photoresist Processing Trouble-Shooting Etchants and Solvents
Strange Appearance (Color, Particles) of the Resist (Film)… Bubbles in the Resist Film? Development Rate too low Dark Erosion too high Lift-off does not work (well) Inferior Resist Adhesion
After Coating? After Exposure? After Baking Steps following Exposure? After Development During/after Coating (e.g. Metallization)? During/after Dry-Etching