Photoresist Processing Trouble-Shooting Etchants and Solvents
Strange Appearance (Color, Particles) of the Resist (Film)… Bubbles in the Resist Film? Development Rate too low Dark Erosion too high Lift-off does not work (well) Inferior Resist Adhesion
Resist Expired? Unsuited Materials Particles or Bubbles in the Resist Film? Gradual Resist Darkening Resist Dilution?